›› 2010, Vol. 23 ›› Issue (7): 48-52.

• 论文 • 上一篇    下一篇



  1. (1西安电子科技大学 技术物理学院,陕西 西安710071;2西安电子科技大学 微电子学院,陕西 西安710071)
  • 出版日期:2010-07-15 发布日期:2010-09-09
  • 通讯作者: 张传丰(1982-),男,硕士研究生。研究方向:材料物理与化学。
  • 作者简介:张传丰(1982-),男,硕士研究生。研究方向:材料物理与化学。

Nondestructive Evaluation System of Antiradiation Performance of LabViewbased SiO2

Zhang Chuanfeng1,Du Lei1,Li Weihua2,Bao Junlin2,Yan Jiaming1   

  1. (1School of Technical Physics,Xidian University,Xian 710071,China;2School of Microelectronics,Xidian University,Xian 710071,China)
  • Online:2010-07-15 Published:2010-09-09



关键词: LabView, SiO2介质材料, 抗辐射, 无损评价


Based on SiO2 dielectric material noise sensitive characterization techniques on MOS device,SiO2 dielectric antiradiation methods are presented.Combined with noise measure experience and the requirements of theoretical analysis,SiO2 dielectric antiradiation nondestructive evaluation systems are developed with LabView.This system consists of data acquisition which is responsible for noise time series and spectrum acquisition and preservation,and data analysis which is responsible for characteristic value analysis of the time sequence and the spectrum,SiO2 dielectric material antiradiation capability analysis and screening of the corresponding devices.Results indicate that it is a reliable software which gives a more accurate evaluation of antiradiation on the MOSFETT.

Key words: LabView;SiO2 dielectric;material antiradiation;nondestructiveevaluation


  • TN30407