›› 2010, Vol. 23 ›› Issue (7): 48-52.

• 论文 • 上一篇    下一篇

基于LabView的SiO2抗辐射能力无损评价系统

张传丰1,杜磊1,李伟华2,包军林2,闫家铭1   

  1. (1西安电子科技大学 技术物理学院,陕西 西安710071;2西安电子科技大学 微电子学院,陕西 西安710071)
  • 出版日期:2010-07-15 发布日期:2010-09-09
  • 通讯作者: 张传丰(1982-),男,硕士研究生。研究方向:材料物理与化学。
  • 作者简介:张传丰(1982-),男,硕士研究生。研究方向:材料物理与化学。

Nondestructive Evaluation System of Antiradiation Performance of LabViewbased SiO2

Zhang Chuanfeng1,Du Lei1,Li Weihua2,Bao Junlin2,Yan Jiaming1   

  1. (1School of Technical Physics,Xidian University,Xian 710071,China;2School of Microelectronics,Xidian University,Xian 710071,China)
  • Online:2010-07-15 Published:2010-09-09

摘要:

基于MOS器件中SiO2介质材料噪声灵敏表征技术,提出了SiO2介质材料抗辐射能力无损评价方法。结合噪声测试的经验及该模型为理论分析要求,使用LabView平台开发SiO2介质材料抗辐射无损评价系统。本系统由数据采集和数据分析两个部分组成,数据采集部分主要负责噪声时间序列与频谱的采集与保存,数据分析部分的主要功能为时间序和频谱的特征值分析及SiO2介质材料抗辐射能力分析与相应器件的筛选。实验结果表明,软件性能可靠,对MOSFETT抗辐射能力的评价准确。

关键词: LabView, SiO2介质材料, 抗辐射, 无损评价

Abstract:

Based on SiO2 dielectric material noise sensitive characterization techniques on MOS device,SiO2 dielectric antiradiation methods are presented.Combined with noise measure experience and the requirements of theoretical analysis,SiO2 dielectric antiradiation nondestructive evaluation systems are developed with LabView.This system consists of data acquisition which is responsible for noise time series and spectrum acquisition and preservation,and data analysis which is responsible for characteristic value analysis of the time sequence and the spectrum,SiO2 dielectric material antiradiation capability analysis and screening of the corresponding devices.Results indicate that it is a reliable software which gives a more accurate evaluation of antiradiation on the MOSFETT.

Key words: LabView;SiO2 dielectric;material antiradiation;nondestructiveevaluation

中图分类号: 

  • TN30407