4H-SiC材料干法刻蚀工艺的研究

4H-SiC材料干法刻蚀工艺的研究

许龙来,钟志亲

Study of Dry Etching in 4H-SiC Material

XU Longlai,ZHONG Zhiqin

电子科技 . 2019, (2): 1 -3 . DOI: 10.16180/j.cnki.issn1007-7820.2019.02.001