Electronic Science and Technology ›› 2019, Vol. 32 ›› Issue (3): 57-60.doi: 10.16180/j.cnki.issn1007-7820.2019.03.012

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Design of MEMS Capacitance Pressure Sensor Measurement Circuit Based on Pcap01

BAO Binghao,CHEN Liang   

  1. School of Mechanical Engineering,Jiangsu University,Zhenjiang 212013,China
  • Received:2018-03-18 Online:2019-03-15 Published:2019-03-01
  • Supported by:
    National Natural Science Fundationof China (51575248)(51575248)


Based on the principle of TDC, a weak capacitance measurement circuit for MEMS capacitive pressure sensors was proposed in this paper. Taking STM32F103 as the main controller, the circuit conducted the timing control of Pcap01 through SP1 bus to complete the collection, analysis, processing and display of the capacitance data. The circuit had the characteristics including small volume, strong anti-interference ability, high resolution and high update rate. Measurements of static capacitance below 10 pF and MEMS capacitive pressure sensor showed that the circuit had a good performance with resolution of 61 aF and 16 bits of effective precision at a refresh rate of 10 Hz.

Key words: MEMS, capacitive pressure sensor, Pcap01, TDC, micro-capacitance measuringtechnology, microprocessor

CLC Number: 

  • TP212