Electronic Science and Technology ›› 2021, Vol. 34 ›› Issue (1): 36-42.doi: 10.16180/j.cnki.issn1007-7820.2021.01.007

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Experimental Study on Milling Pure Copper with 50 μm D-Shaped Cemented Carbide Micro-Milling Cutter

YAN Guanghe1,2,JIANG Chen1,ZHANG Yongbin2,HONG Xiaolan1,QIAN Dabing1   

  1. 1. School of Mechanical Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China
    2. Institute of Machinery Manufacturing Technology,China Academy of Engineering Physics,Mianyang 621900,China
  • Received:2019-11-07 Online:2021-01-15 Published:2021-01-22
  • Supported by:
    National Natural Science Foundation of China(51475310);Innovation Development Fund Innovation Project(K1173-1921-TCF)


According to the requirement of miniaturization and high precision of folded waveguide slow wave structure, D-Shaped micro-milling cutter with diameter of 50 μm is fabricated by WEDG with the self-developed μEM-200CDS2 combined high precision machine tool. The surface quality of the microgroove is studied by the process test on the pure copper workpiece. White-light interferometer, ultra-depth-of-field microscope and scanning electron microscope are used to observe the variation of surface morphology and roughness of micro-grooves with milling distance, and the surface quality and burr formation during micro-milling are analyzed. These results show that the revolving track of the groove bottom tool is firstly concentrated in the cutting direction of the tool, and with the tool wear, it turnes to the feed direction of the tool. The burrs on the milling side of the micro groove are more than those on the reverse side, and increases with the increase of milling distance. Additionally, the roughness of the groove bottom increases with the linear growth trend.

Key words: folded waveguide slow wave structure, wire electro-discharge grinding, D-shaped micro-milling cutter, surface quality, burr formation, roughness

CLC Number: 

  • TN605