›› 2010, Vol. 23 ›› Issue (8): 1-.

• Articles •     Next Articles

Three-dimensional Models of and Algorithms for Micro-manufacture Simulations

 XU Dong-Liang, ZHANG Jian, XU Xiao-Lin   

  1. (School of Electronic Science & Applied Physics,Hefei University of Technology,Hefei 230009,China)
  • Online:2010-08-15 Published:2011-03-28


Micro-manufacture develops MEMS technology in the recent decade.In this manufacture,3D topography simulations are important to designing the fabrications and devices of MEMS.New developments of models of and algorithms for three-dimensional topography simulation in recent years are introduced and compared,with some simulated samples enumerated.

Key words: topography simulation;three-dimensional;algorithm

CLC Number: 

  • TP391.9