Abstract:

This paper describes the method for the determination of trace Al、Fe、Ca、Mg、Cu、Zn、Cr、Ni and Mn in solar grade polysilicon by inductively coupled plasma mass spectrometry.The mass spectral interference and the matrix effect are discussed.Sc and Rh are used as internal standard to corrected the interference due to the effects of matrix and interface efficiently.Under the optimum conditions the detection limits for impurities were in the range of 0.030 g/L～0.500 g/L.The recoveries were within 90.0%～107.1% and  relative standard deviation within 0.9%～3.4%.

Key words: ICP-MS;polysilicon;metal impurities