›› 2014, Vol. 27 ›› Issue (5): 22-.

• Articles • Previous Articles     Next Articles

Electron Beam Melting Furnace High Voltage Power Supply for Polysilicon Purification

SU Zhenyuan,WEI Shouqi,WANG Zongkun,LIU Zhijie,ZHU Sisi,FEI Xiang   

  1. (1.School of Mechanical Electrical Engineering,Guilin University of Electronic Technology,Guilin 541004,China;2.Guilin THD Mech. & Elec. Engineering Company Limited,Guilin 541004,China)
  • Online:2014-05-15 Published:2014-05-14


Polycrystalline silicon Polycrystalline silicon is the most widely used semiconductor material.With the rapid development of science and technology,high-quality semiconductor Polycrystalline silicon has become the foundation of modern information industry.Using electron beam melting furnace to produce and purified polysilicon is a new technique and has been successfully applied to the preparation methods of industrial production because of its efficient pollution-free preparation and energy conservation features.A voltage regulation using controlled reactor power control scheme is put forward considering the characteristics of electron beam melting furnace high voltage power supply controller and the existing shortcomings,and its working principle and characteristics of the circuit are introduced in detail.Experiments show that this control method can accurately adjust the output voltage with a natural current limiting characteristic,which fully achieves the performance indicators.The whole system is stable and reliable,and overcomes the disadvantages of traditional thyristors that use AC phase shifting to regulate voltage control.It has the advantages of small input resistance,large short circuit impedance,high power factor and efficiency,and no public nuisance to power grid.

Key words: polysilicon;three phase controllable reactor;the closed loop control;natural current limiting

CLC Number: 

  • TN304.1+2