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新型阴极粘贴技术制备三极CNT-FED的研究

李玉魁1,2;李德昌3;朱长纯1   

  1. (1. 西安交通大学 电子与信息工程学院电子系,陕西 西安 710049; 2. 中原工学院 电子信息学院,河南 郑州 450007; 3. 西安电子科技大学 理学院,陕西 西安 710071)

  • 收稿日期:1900-01-01 修回日期:1900-01-01 出版日期:2005-04-20 发布日期:2005-04-20

The fabrication of the triode CNTFED with new cathode-pasting technology

LI Yu-kui1,2;LI De-chang3;CHU Chang-chun1

  

  1. (1. School of Electronic and Information Engineering, Xi′an Jiaotong Univ., Xi′an 710049, China; 2. School of Electron Information Zhong Yuan Institute of Technology, Zhengzhou 450007, China; 3. School of Science, Xidian Univ., Xi′an 710071, China)
  • Received:1900-01-01 Revised:1900-01-01 Online:2005-04-20 Published:2005-04-20

摘要: 利用催化剂高温分解在硅衬底上生长了碳纳米管薄膜阴极;采用丝网印刷工艺、高温烧结工艺以及低熔点玻璃封接技术,制作了三极结构的碳纳米管场致发射显示器器件.采用了新型的阴极粘贴技术来装配碳纳米管阴极,解决了硅片和封装玻璃之间热膨胀系数不一致的技术难题,实现了稳定可靠的整体器件高温封装,同时也避免了其他器件制作工艺对碳纳米管阴极的损伤,增强了阴极装配技术的适用性和灵活性.整体显示器具有良好的场致发射特性以及比较高的显示亮度.

关键词: 碳纳米管, 场致发射, 阴极粘贴, 三极显示器

Abstract: The carbon nanotube film cathode is prepared on the silicon substrate by the catalyst-pyrolysis process. The triode CNTFED device sample is fabricated by the simple screen-printing process, high temperature sintering process and low-melting-point-glass sealing-in technology. The carbon nanotube cathode is assembled by new cathode-pasting technology, so the difficulty of the existence of the difference in thermal expansion coefficients between the silicon substrate and the packaging glass is settled, and the contamination of the carbon nanotube cathode is avoided. The stable and reliable whole device packaging is confirmed by new cathode-pasting technology, and the applicability and flexibility of the cathode-assembly-method are obviously improved. The whole FED possesses better filed emission characteristics and higher vision brightness.

Key words: carbon nanotube, field emission, cathode-pasting, triode display

中图分类号: 

  • TB303