一种碳化硅外延层质量评估新技术

一种碳化硅外延层质量评估新技术

马格林;张玉明;张义门;马仲发

New quality evaluation technique for the SiC epilayer

MA Gelin;ZHANG Yuming;ZHANG Yimen;MA Zhongfa

J4 . 2011, (6): 37 -43+96 . DOI: 10.3969/j.issn.1001-2400.2011.06.006