绝缘层上单轴应变硅的应力计算与分析
苗东铭;戴显英;吴淑静;赵天龙;邵晨峰;郝跃
Stress calculation and analysis of uniaxially strained silicon on the insulator
MIAO Dongming;DAI Xianying;WU Shujing;ZHAO Tianlong;SHAO Chenfeng;HAO Yue
西安电子科技大学学报
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2018, (1): 162
-167
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DOI: 10.3969/j.issn.1001-2400.2018.01.029
