氮钝化对SiC MOS电容栅介质可靠性的影响
白志强,张艺蒙,汤晓燕,宋庆文,张玉明,戴小平,高秀秀,齐放
The effect of nitrogen passivation on gate dielectric reliability of SiC MOS capacitors
BAI Zhiqiang,ZHANG Yimeng,TANG Xiaoyan,SONG Qingwen,ZHANG Yuming,DAI Xiaoping,GAO Xiuxiu,QI Fang
西安电子科技大学学报
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2022, (3): 206
-212
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DOI: 10.19665/j.issn1001-2400.2022.03.023
