Abstract: "Stick" affects the performance and reliability of the MEMS device greatly. The "cutting-ball" adhesion model of the micro-cantilever rough surface is set up on the basis of the three hypotheses. By the Hamaker micro continuum medium method and gap revision principle, the adhesion mathematical model is found. The adhesion simulation results are obtained, and followed by the discussion of the rough degree influence on adhesion.

Key words: MEMS, surface rough degree, adhesion force