Abstract: Lumped behavioral models for the micro-silicon gyroscope is presented. In this method, the micromachined gyroscope is partitioned into many functional components, each of which is modeled using the relative movement theory and energy method, and whose parameterized model coded in Verilog-A is realized. To validate the efficiency of the models, a system-level model for the tuning fork gyroscope composed of functional components models is designed and co-simulated with an electronic circuit in cadence spectre. The simulation result of modal frequency of the gyroscope is accurate to within 1% of the ANSYS analysis. The result also indicates that the transient analysis of the complicated electro-mechanical coupled system is accomplished quickly in this way.

Key words: micro-electronic mechanic system(MEMS), modeling, system-level simulation, gyroscope