Fabrication of the uniaxial stained SOI wafer by mechanical bending
DAI Xianying;WANG Lin;YANG Cheng;ZHENG Ruochuan;ZHANG Heming;HAO Yue
J4 . 2012, (3): 209 -212 .  DOI: 10.3969/j.issn.1001-2400.2012.03.034