Analysis of the driving mechanism of the large-displacement low-voltage electrostatic micro-actuator based on the principle of vertical-horizontal bending
TIAN Wenchao;CHEN Zhiqiang;JIA Jianyuan
J4 . 2014, (2): 85 -89 .  DOI: 10.3969/j.issn.1001-2400.2014.02.014

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