The effect of nitrogen passivation on gate dielectric reliability of SiC MOS capacitors
BAI Zhiqiang,ZHANG Yimeng,TANG Xiaoyan,SONG Qingwen,ZHANG Yuming,DAI Xiaoping,GAO Xiuxiu,QI Fang
Journal of Xidian University . 2022, (3): 206 -212 .  DOI: 10.19665/j.issn1001-2400.2022.03.023

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