Growth and characterization of polycrystal SiC films on porous Si substrates via APCVD process
JIA Hu-jun;YANG Yin-tang;LI Yue-jin
J4 . 2009, (2): 298 -300 . 

Copyright © 2018 Journal of Xidian University, All Rights Reserved.
Powered by Beijing Magtech Co. Ltd