Abstract: The Scanning Probe Microscope(SPM), which was invented for imaging the topographic at the atomic level, becomes a method for manipulating the single atom and fabricating nanometer-scale structures on the solid surface and for the realization of single-atom and single-electron devices. This capability makes it increasingly attractive and powerful for use in diverse areas, such as gene engineering, life science, material science, biotechnology and surface technology. The histories of the Scanning Probe icroscopy are introduced in this paper, followed by the principles, characteristics, actual conditions and applications. Its applications in single atom mainpulation, life science and information science are emphasized. Finally the research directions are put forward.

Key words: scanning probe microscope, scanning tunneling microscope, atomic force microscope, single atom mainpulation, nanometer-technology