Abstract: an electromechanical-coupled mechanics model is established for the circle-flake microactuator, which is based on the working principle of piezoelectricity. By using the elastic thin plate bending theory with small deflection, we derive some differential equations for the elastic curved surface in circular piezoelectric composite laminates and present an analysis and design method in which piezoelectric patch's radial strain induced by the inverse piezoelectric effect is equivalently substituted with transverse stress on piezoelectric composite laminates. It is pointed out that the equivalent transverse load depends on the edge electric field distribution of the parallel plate capacitor. The expression for the neutral plane in the piezoelectric composite laminates is derived. On obtaining the numerical solution of the transcendental equation for the electric field, a finite element structural model for the micro actuator is developed. Finally a static analysis of the model of the micropump is simulated with satisfactory results.

Key words: MEMS, microactuator, PZT, piezoelectricity, micropump