Abstract:

The relatively low piezoelectric constant of the aluminum nitride piezoelectric film limits the development and application of the piezoelectric micro-machined ultrasonic transducer based on the aluminum nitride. Therefore, the directivity of the piezoelectric micro-machined ultrasonic transducer array is studied for this problem. First, the far-field sound pressure and normalized directivity function of the transducer array are calculated according to the Rayleigh principle. Furthermore, the effects of array element radius, array element spacing, array element number and operating frequency on the beam width, direction sharpness angle and sidelobe level of the array are analyzed, and the transducer array is optimized. Finally, based on the optimization results, area and filling efficiency, the final structure size of the transducer array is determined and the sound pressure distribution visually simulated. The results show that the optimized transducer array has an ideal sound pressure distribution, good directivity and sharp main lobe. The-3dB beamwidth of the main lobe is about 9 ° and the sidelobe level is about 0.228.

Key words: piezoelectric micro-machined ultrasonic transducer array, AlN, performance optimization, directivity