硅基大位移低驱动电压静电微驱动器变形分析

doi:10.3969/j.issn.1001-2400.2012.04.020

Abstract

Abstract:

The development trend of the micro actuator is the large-displacement, low-voltage and fast response. At present, the main drive mode of the micro actuator is the electrostatic transverse loading. However, its drive voltage is too high and deformation is too small. The model of a micro actuator with large displacement low voltage is presented based on the principle of the vertically-horizontally bending. The elastic force is transformed from the restoring force to the driving force. The deflection equation of the micro beam is derived. Simulation shows that the displacement is as large as 145μm and the driving voltage is as low as 5V. The displacement and driving voltage are superior to those of the current micro actuator.

Key words: MEMS, micro actuator, vertically-horizontally bending, deflection equation

CLC Number:

TH73

TIAN Wenchao;JIA Jianyuan. Analysis of the Si micro actuator with large displacement and low voltage[J].J4, 2012, 39(4): 109-113.

References

［1］赵剑, 贾建援, 王洪喜, 等. 双稳态屈曲梁的非线性特性分析［J］. 西安电子科技大学学报, 2007, 34(3): 458-462.
Zhao Jian, Jia Jianyuan, Wang Hongxi, et al. Nonlinear Snap-through Characteristic of a Compressed Bi-stable Buckled Beam［J］. Journal of Xidian University, 2007, 34(3): 458-462.
［2］侯智昊, 刘泽文, 李志坚. DC-30 GHz并联接触式RF MEMS开关的设计与制造［J］. 光学精密工程, 2009, 17(8): 1923-1934.
Hou Zhihao, Liu Zewen, Li Zhijian. Design and Fabrication of DC to 30 GHz DC-contact Shunt RF MEMS Switch［J］. Optics and Precision Engineering, 2009, 17(8): 1923-1934.
［3］董乔华, 廖小平, 黄庆安, 等. RF MEMS开关吸合电压的分析［J］. 半导体学报, 2008, 29(1): 163-169.
Dong Qiaohua, Liao Xiaoping, Huang Qing'an, et al. Analysis of Pull-In Voltage of RF MEMS Switches［J］. Journal of Semiconductors, 2008, 29(1): 163-169.
［4］ Mahameed R, Rebeiz G. A High-power Temperature-stable Electrostatic RF MEMS Capacitive Switch Based on a Thermal Buckle-beam Design ［J］. Journal of Microelectromechanical Systems, 2010, 19(4): 819-830.
［5］ Srinivasan P, Gollasch C, Kraft M. Three Dimensional Electrostatic Actuators for Tunable Optical Micro Cavities ［J］. Sensors and Actuators A, 2010, 161(1): 191-198.
［6］ Gaspar J, Schmidt M, Pedrini G. Out of Plane Electrostatic Micro Actuators with Tunable Stiffness ［R］. Hong Kong: 2010 IEEE 23rd International Conference on MEMS, 2010: 1131-1134.
［7］田文超. 微机电技术(MEMS)原理、设计与分析［M］. 西安: 西安电子科技大学出版社, 2009.
［8］ Vitushinsky R, Schmitz S, Ludwig A. Bistable Thin-film Shape Memory Actuators for Applications in Tactile Displays ［J］. Journal of Microelectromechanical Systems, 2009, 18(1): 186-195.
［9］朱应敏, 贾建援, 田文超, 等. 永磁微加速度开关设计与仿真［J］. 西安电子科技大学学报, 2007, 34(2): 285-289.
Zhu Yingmin, Jia Jianyuan, Tian Wenchao, et al. Modeling and Simulation of a Micro Magnetic Acceleration Switch［J］. Journal of Xidian University, 2007, 34(2): 285-289.

[1]	LIU Lei,JIA Renxu. Analysis of sensitivity uncertainty of the MEMS microphone based on Latin hypercube Monte Carlo simulation [J]. Journal of Xidian University, 2019, 46(6): 23-29.
[2]	TIAN Wenchao;CHEN Zhiqiang;JIA Jianyuan. Analysis of the driving mechanism of the large-displacement low-voltage electrostatic micro-actuator based on the principle of vertical-horizontal bending [J]. J4, 2014, 41(2): 85-89.
[3]	SHAN Guang-bao1;YANG Yin-tang2;LIU You-bao1;ZHU Zhang-ming2. Modeling of the micro-silicon gyroscope [J]. J4, 2007, 34(2): 227-232.
[4]	ZHU Ying-min;JIA Jian-yuan;TIAN Wen-chao;FAN Kang-qi. Modeling and simulation of a micro magnetic acceleration switch [J]. J4, 2007, 34(2): 285-289.
[5]	TIAN Wen-chao;JIA Jian-yuan. Analysis of the micro-cantilever rough surface adhesion model [J]. J4, 2004, 31(5): 749-752.
[6]	JIA Jian-yuan;FAN Guo-bin;WANG Wei-dong. Analysis and design of the structure of micro circle-flake with the piezoelectric actuator [J]. J4, 2003, 30(1): 42-46.

Analysis of the Si micro actuator with large displacement and low voltage

PDF (PC)

Like

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 6

Metrics

Comments

Recommended 0