Journal of Xidian University

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Design of and experiment on a bending hybrid ultrasonic motor with single driving foot

LIU Yingxiang;YAN Jipeng;XU Dongmei;YANG Xiaohui;CHEN Weishan   

  1. (State Key Lab. of Robotics and System, Harbin Institute of Technology, Harbin 150001, China)
  • Received:2015-11-15 Online:2017-02-20 Published:2017-04-01

Abstract:

For the aim of miniaturization, this work chooses the third bending mode of beam as the piezoelectric actuator's vibration mode. By using the finite element method, the proposed motor is designed and analyzed. By modal analysis, the parameters of structure are designed. By harmonic analysis, the mechanic quality factor and electromechanical coupling factor of the proposed actuator are obtained. Based on theory and simulation, a prototype of the proposed piezoelectric actuator is fabricated. Impedance analyses are executed by the Agilent precision impedance analyzer. Mechanical output characteristics of the prototype are obtained experimentally. The maximal no-load velocity of the proposed motor is 735mm/s and the maximal output force is 1.1N.

Key words: piezoelectric actuator, linear, bending modes hybrid, bonded type structure, the third bending mode