CFD modeling of relaxation SiGe RPCVD
DAI Xianying;ZHENG Ruochuan;GUO Jingjing;ZHANG Heming;HAO Yue;SHAO Chenfeng;JI Y
J4 . 2012, (5): 186 -191 .  DOI: 10.3969/j.issn.1001-2400.2012.05.031

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