硅基大位移低驱动电压静电微驱动器变形分析

doi:10.3969/j.issn.1001-2400.2012.04.020

J4 ›› 2012, Vol. 39 ›› Issue (4): 109-113.doi: 10.3969/j.issn.1001-2400.2012.04.020

硅基大位移低驱动电压静电微驱动器变形分析

田文超;贾建援

(西安电子科技大学机电工程学院，陕西西安 710071)

收稿日期:2011-04-22 出版日期:2012-08-20 发布日期:2012-10-08
通讯作者: 田文超
作者简介:田文超(1968-)，男，教授，E-mail: tianwenchao@21cn.com．
基金资助:
国家自然科学基金资助项目(61176130);教育部基本科研业务费资助项目(JY10000904016)

Analysis of the Si micro actuator with large displacement and low voltage

TIAN Wenchao;JIA Jianyuan

(School of Mechano-electronic Engineering, Xidian Univ., Xi'an 710071， China)

Received:2011-04-22 Online:2012-08-20 Published:2012-10-08
Contact: TIAN Wenchao

摘要/Abstract

摘要：

针对目前横向加载单向变形静电微驱动器存在的位移过小或驱动电压过大的问题，提出一种基于纵横弯曲变形原理的硅基大位移低电压静电微驱动器模型，将弹性力由传统意义的恢复力改变为驱动力，推导出微驱动器挠度变形的控制方程．通过仿真发现，该驱动器的驱动位移高达145μm，远大于目前微驱动器的变形量; 驱动电压仅为5V，远低于目前微驱动器的驱动电压值．

关键词: 微电子机械系统, 微驱动器, 纵横弯曲, 挠度方程

Abstract:

The development trend of the micro actuator is the large-displacement, low-voltage and fast response. At present, the main drive mode of the micro actuator is the electrostatic transverse loading. However, its drive voltage is too high and deformation is too small. The model of a micro actuator with large displacement low voltage is presented based on the principle of the vertically-horizontally bending. The elastic force is transformed from the restoring force to the driving force. The deflection equation of the micro beam is derived. Simulation shows that the displacement is as large as 145μm and the driving voltage is as low as 5V. The displacement and driving voltage are superior to those of the current micro actuator.

Key words: MEMS, micro actuator, vertically-horizontally bending, deflection equation

中图分类号:

TH73

田文超;贾建援. 硅基大位移低驱动电压静电微驱动器变形分析[J]. J4, 2012, 39(4): 109-113.

TIAN Wenchao;JIA Jianyuan. Analysis of the Si micro actuator with large displacement and low voltage[J]. J4, 2012, 39(4): 109-113.

参考文献

［1］赵剑, 贾建援, 王洪喜, 等. 双稳态屈曲梁的非线性特性分析［J］. 西安电子科技大学学报, 2007, 34(3): 458-462.
Zhao Jian, Jia Jianyuan, Wang Hongxi, et al. Nonlinear Snap-through Characteristic of a Compressed Bi-stable Buckled Beam［J］. Journal of Xidian University, 2007, 34(3): 458-462.
［2］侯智昊, 刘泽文, 李志坚. DC-30 GHz并联接触式RF MEMS开关的设计与制造［J］. 光学精密工程, 2009, 17(8): 1923-1934.
Hou Zhihao, Liu Zewen, Li Zhijian. Design and Fabrication of DC to 30 GHz DC-contact Shunt RF MEMS Switch［J］. Optics and Precision Engineering, 2009, 17(8): 1923-1934.
［3］董乔华, 廖小平, 黄庆安, 等. RF MEMS开关吸合电压的分析［J］. 半导体学报, 2008, 29(1): 163-169.
Dong Qiaohua, Liao Xiaoping, Huang Qing'an, et al. Analysis of Pull-In Voltage of RF MEMS Switches［J］. Journal of Semiconductors, 2008, 29(1): 163-169.
［4］ Mahameed R, Rebeiz G. A High-power Temperature-stable Electrostatic RF MEMS Capacitive Switch Based on a Thermal Buckle-beam Design ［J］. Journal of Microelectromechanical Systems, 2010, 19(4): 819-830.
［5］ Srinivasan P, Gollasch C, Kraft M. Three Dimensional Electrostatic Actuators for Tunable Optical Micro Cavities ［J］. Sensors and Actuators A, 2010, 161(1): 191-198.
［6］ Gaspar J, Schmidt M, Pedrini G. Out of Plane Electrostatic Micro Actuators with Tunable Stiffness ［R］. Hong Kong: 2010 IEEE 23rd International Conference on MEMS, 2010: 1131-1134.
［7］田文超. 微机电技术(MEMS)原理、设计与分析［M］. 西安: 西安电子科技大学出版社, 2009.
［8］ Vitushinsky R, Schmitz S, Ludwig A. Bistable Thin-film Shape Memory Actuators for Applications in Tactile Displays ［J］. Journal of Microelectromechanical Systems, 2009, 18(1): 186-195.
［9］朱应敏, 贾建援, 田文超, 等. 永磁微加速度开关设计与仿真［J］. 西安电子科技大学学报, 2007, 34(2): 285-289.
Zhu Yingmin, Jia Jianyuan, Tian Wenchao, et al. Modeling and Simulation of a Micro Magnetic Acceleration Switch［J］. Journal of Xidian University, 2007, 34(2): 285-289.

[1]	田文超;陈志强;贾建援. 低压大位移静电微驱动器驱动机理分析[J]. J4, 2014, 41(2): 85-89.
[2]	郭永献;贾建援;张大兴. 电磁驱动微器件动态吸合特性分析[J]. J4, 2009, 36(5): 896-901.
[3]	赵剑;贾建援;王洪喜;张文波. 双稳态屈曲梁的非线性跳跃特性研究 [J]. J4, 2007, 34(3): 458-462.
[4]	单光宝1;杨银堂2;刘佑宝1;朱樟明2. 硅微陀螺仪的建模 [J]. J4, 2007, 34(2): 227-232.
[5]	朱应敏;贾建援;田文超;樊康旗. 永磁微加速度开关设计与仿真 [J]. J4, 2007, 34(2): 285-289.
[6]	田文超;贾建援. 微悬臂梁粗糙表面粘附建模分析[J]. J4, 2004, 31(5): 749-752.
[7]	贾建援;范国滨;王卫东. 压电致动式圆片驱动装置结构分析与设计[J]. J4, 2003, 30(1): 42-46.
[8]	贾建援;邵彬;冯小平. 数字微反射镜装置的分析与设计[J]. J4, 2001, 28(1): 1-5.
[9]	暂时无作者信息. 线性分组码的网格图复杂度[J]. J4, 2001, 28(1): 39-43.

硅基大位移低驱动电压静电微驱动器变形分析

Analysis of the Si micro actuator with large displacement and low voltage

PDF (PC)

赞

可视化

被引次数

摘要/Abstract

引用本文

使用本文

参考文献

相关文章 9

Metrics

本文评价

推荐阅读 0