Abstract: According to the temperature characteristics of the reactor and the requirements for temperature control in the MOCVD system, a kind of Fuzzy-PID temperature controller is proposed. Fuzzy-PID can realize the PID parameters on-line self-regulation, normalizing varying PID parameter coefficients into the range between 0 and 1 by using fuzzy control. In addition, the corresponding simulation is given. The results indicate that the Fuzzy-PID controller has better control performance (such as non-linearity, hysteresis and unprecision physical model) than the Smith controller, and can meet the design requirements for the MOCVD temperature controller.

Key words: MOCVD, temperature control, Fuzzy-PID control