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A novel SET process with Indium quantum islands
GUO Rong-hui(1);ZHAO Zheng-ping(1);HAO Yue(1);LIU Yu-gui(2); WU Yi-bin(2);Lü Miao(2)
(1) Research Inst. of Microelectronics, Xidian Univ., Xi’an 710071, China
(2) Hebei Semiconductor Research Institute, Shijiazhuang 050051, China