J4

• Original Articles • Previous Articles     Next Articles

A novel SET process with Indium quantum islands

GUO Rong-hui(1);ZHAO Zheng-ping(1);HAO Yue(1);LIU Yu-gui(2); WU Yi-bin(2);Lü Miao(2)

  

  1. (1) Research Inst. of Microelectronics, Xidian Univ., Xi’an 710071, China
    (2) Hebei Semiconductor Research Institute, Shijiazhuang 050051, China

  • Received:1900-01-01 Revised:1900-01-01 Online:2006-04-20 Published:2006-04-20

Abstract: A new Single-electron Transistor with Indium Quantum Dots is presented. By virtue of the high resolution of the EBL and the accurately controllable growth of the MBE, Indium Quantum Dots are grown in the nanometer gap of the electrodes. With these Indium quantum dots as coulomb islands, a kind of SET with multi-islands is prepared, and the coulomb blockade effect is observed successfully.

Key words: single-electron transistors, Coulomb blockade, quantum dots

CLC Number: 

  • TN303