Abstract: This paper presents a new fuzzy predictive control method for the MOCVD device control system set to handle the non-linearity, time variability and large delay of plant controls. The designed controller consists of a fuzzy part and a predictor. The dynamics of the prediction term is adaptive to the systems time delay. Simulation results illustrate that this method is well adaptive to the alteration and improves the static precise and dynamic performance of the system, compared with its conventional counterpart. In addition, the basic error can reach 1℃‰ referred to input range.

Key words: MOCVD, fuzzy predictive control, temperature control, control algorithm