J4 ›› 2015, Vol. 42 ›› Issue (6): 70-74.doi: 10.3969/j.issn.1001-2400.2015.06.013

• Original Articles • Previous Articles     Next Articles

Novel combined edge termination for P-channel VDMOS

PU Shi;DU Lin;ZHANG Dexi   

  1. (Ministry of Education Key Lab. of Wide Band-Gap Semiconductor Materials and Devices, Xidian Univ., Xi'an  710071, China)
  • Received:2014-06-17 Online:2015-12-20 Published:2016-01-25
  • Contact: PU Shi E-mail:simon.pu@foxmail.com

Abstract:

This paper is focused on the improvement of the breakdown voltage for P-channel Vertical Double-diffuse MOSFET(VDMOS), mainly on the structure that is combined with the field limiting ring and the field plate. Based on their basic theories, this paper presents a novel junction termination for P-channel VDMOS with a structure of an N+ offset region field limiting ring and two multistep field plates. Simulation results have proved its effective improvement on the electric field distribution at the edge of the main junction. With these achievements, an -80V P-channel VDMOS is designed and fabricated using this structure. The test for the breakdown voltage of the manufactured sample devices has been conducted and experimental results turn out to be in good accord with the simulation results, demonstrating the validity of the design.

Key words: P-channel vertical double-diffuse MOSFET, edge termination, field limiting ring, N+ offset region, multi-step field plate

CLC Number: 

  • TN432