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The process capability index analysis of non-normal distribution parameters

JIA Xin-zhang;SONG Jun-jian;PU Jian-bin

  

  1. (Research Inst. of Microelectronics, Xidian Univ., Xi'an 710071 China)
  • Received:1900-01-01 Revised:1900-01-01 Online:2004-02-20 Published:2004-02-20

Abstract: Using the traditional method to calculate the process capability index Cpk of the non-normal distribution parameters appearing in semiconductor device production will result in wrong conclusion. A new method is suggested and a software program is developed for calculation the Cpk and yield of non-normal distribution parameters at the PPM level.

Key words: keywords

CLC Number: 

  • TN405