基于PSD的微位移测量系统研究

›› 2014, Vol. 27 ›› Issue (6): 180-.

基于PSD的微位移测量系统研究

王帅帅,祝连庆,周维虎,董登峰,周培松

(1.北京信息科技大学仪器科学与光电工程学院,北京 100192;2.中国科学院光电研究院,北京 100094;3.合肥工业大学仪器科学与光电工程学院,安徽合肥 23009)

出版日期:2014-06-15 发布日期:2014-06-14
作者简介:王帅帅(1988—),男,硕士研究生。研究方向:精密计量与测试。E-mail:wangss0110@163.com
基金资助:
国家重大科学仪器设备开发专项基金资助项目(2011YQ120022)

Research on Micro-Displacement Measurement System Based on PSD

WANG Shuaishuai,ZHU Lianqing,ZHOU Weihu,DONG Dengfeng,ZHOU Peisong

(1.School of Instrument Science and Opto-Electronic Engineering,Beijing Information Science & Technology University,Beijing 100192,China;2.Academy of Opto-Electronics,Chinese Academy of Science,Beijing 100094,China;3.Instrument Science and Opto-electronics Engineering,Hefei University of Technology,Hefei 23009,China)

Online:2014-06-15 Published:2014-06-14

摘要/Abstract

摘要：

介绍了PSD的结构、特性和工作原理,设计了一种基于PSD探测器的微位移测量系统。针对PSD信号输出特点和实际应用要求,提出了基于PSD的微位移信号采集、处理和上位机通信系统。单片机通过ADS7864采集PSD的输出信号,处理后由RS232接口传给上位机,位移值在上位机界面显示,实现了对光斑微位移量的实时测量。实验结果表明,该系统响应速度快、测量精度高,可广泛应用于微位移测量领域。

关键词: PSD, 微位移, ADS7864, 双线性插值

Abstract:

The structure,characteristics and operational principle of PSD are introduced in this paper.A micro-displacement measurement system based on PSD with high precision is designed.Aiming at the characteristics of PSD signal output and requirements of practical application,a system is designed based on the PSD signal acquisition,processing and transmission to PC.MCU collects signal output by PSD via ADS7864 and transmits the processed data to the host computer via the RS232 interface.The displacement value is displayed on the PC interface,which realizes real-time measurement of light spot's micro-displacement.Experimental results show that the system has quick response and high accuracy,and can be widely used in micro-displacement measurement.

Key words: PSD;micro displacement;ADS7864;bilinear interpolation

中图分类号:

TN364+.2

王帅帅,祝连庆,周维虎,董登峰,周培松. 基于PSD的微位移测量系统研究[J]. , 2014, 27(6): 180-.

WANG Shuaishuai,ZHU Lianqing,ZHOU Weihu,DONG Dengfeng,ZHOU Peisong. Research on Micro-Displacement Measurement System Based on PSD[J]. , 2014, 27(6): 180-.

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