关键词: 不对称梳齿, 电容式加速度计, 体硅工艺

Abstract:

A novel concept of the triaxis micro capacitive accelerometer is proposed.This accelerometer consists of two inertial mass blocks to detect the horizontal and vertical acceleration simultaneously.The asymmetrical comb removes the vertical interference with the horizontal acceleration from the zaxis and the support of the beam of the zaxis significantly minimizes the coupling from the lateral acceleration.In order to improve the detection performance of the accelerometer,differential capacitance is proposed.Static and modal analysis with Ansys verifies the feasibility of the structure in theory.

Key words: asymmetrical comb;capacitive accelerometer;bulk silicon process