一种采用精缩机拼接斜线条图形的方法

›› 2013, Vol. 26 ›› Issue (5): 22-.

一种采用精缩机拼接斜线条图形的方法

黄迪辉,黄征宇

(中南大学物理与电子学院,湖南长沙 410083)

出版日期:2013-05-15 发布日期:2013-06-20
作者简介:黄迪辉(1961—),男,高级工程师。研究方向:半导体材料,器件,工艺及表征。E-mail:huangdihui@csu.edu.cn

A Method for Making Oblique Rectangle by Using the Photorepeater

HUANG Dihui,HUANG Zhengyu

(School of Physics and Electronics,Central South University,Changsha 410083,China)

Online:2013-05-15 Published:2013-06-20

摘要/Abstract

摘要：

提出一种由曝光单元拼接斜矩形线条的数学模型,基于该模型编制了一款数据处理程序。利用该数据处理程序和特制的光栏版,使精缩机实现图形发生器的功能,精确拼接出无锯齿状边缘的斜线条图形,为制作特殊的掩模版提供了一种实用的方法。

关键词: 精缩机, 图形发生器, 光栏, 掩模版

Abstract:

A mathematical model of making oblique rectangle by a smaller rectangle is proposed and a procedure based on this model is programmed.By means of the procedure and a particular diaphragm,the photorepeater acts as a pattern generator.The oblique rectangles without any jagged edge are made accurately.It is a practical method for making particular photomasks.

Key words: photorepeater;pattern generator;diaphragm;photomask

中图分类号:

TN305.6

黄迪辉,黄征宇. 一种采用精缩机拼接斜线条图形的方法[J]. , 2013, 26(5): 22-.

HUANG Dihui,HUANG Zhengyu. A Method for Making Oblique Rectangle by Using the Photorepeater[J]. , 2013, 26(5): 22-.