用于微机械加速度计的亚微米工艺ADC设计

doi:10.19665/j.issn1001-2400.2019.03.021

Abstract

Abstract:

A 16 bits high-order ∑Δ analog-to-digital converter is proposed based on the submicron process to meet the application requirements for the digital output of high-performance micromechanical accelerometers. The fifth-order feedforward single bit quantization topology is adopted to achieve the low-distortion analog-to-digital converter output. The front-stage integrator adopts the gain-enhanced folded-cascode operational amplifier structure to improve the low-frequency gain and reduce the influence of gain nonlinearity on analog-to-digital converter distortion. The optimization of the integrator output swing and the application of the switched-capacitor common mode feedback circuit reduce the overall power consumption. Test results show that the distortion is lower than 90dB when the sampling frequency is 8MHz and a little higher than 90dB when the sampling frequency is reduced to 4MHz for the low power dissipation mode. This high integration and large dynamic range fifth-order feedforward sigma-delta analog-to-digital converter topology achieves 16 bits resolution, and it can be applied for digitizing the output signal of micromechanical accelerometers.

Key words: micromechanical accelerometer, sigma-delta analog-to-digital converter, low-distortion, gain-enhanced folded-cascode

CLC Number:

YU Jianhai,YIN Liang. Design of an ADC with the submicron process for micromechanical accelerometers[J].Journal of Xidian University, 2019, 46(3): 140-147.

Figures/Tables 14

References 21

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参数	结果
工艺/μm	0.5
精度/位	16
功耗	12mW@4MHz采样
采样频率/MHz	>4
带宽/kHz	>15(典型值20)
SNR/dB	98
SFDR/dB	约8
动态范围(DR)/dB	101

文献	工艺/μm	面积/mm²	功耗/mW	信噪比/dB	带宽/kHz	X_FOM
[1]	0.180	0.002 0	15.500	82.7	96.0	1.38×10^-9
[5]	0.600	2.120 0	15.000	100.0	15.0	1.66×10^-9
[20]	0.130	0.337 5	0.075	61.0	10.0	2.48×10^-9
[21]	0.500	9.840 0	90.000	96.0	21.8	0.25×10^-9
文中	0.500	7.500 0	12.000	98.0	20.0	2.19×10^-9

Design of an ADC with the submicron process for micromechanical accelerometers

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References 21

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