多棱镜激光扫描非球面透镜聚焦系统研究

›› 2015, Vol. 28 ›› Issue (11): 61-.

多棱镜激光扫描非球面透镜聚焦系统研究

姚红兵,李亚茹,高原,于文龙

(江苏大学机械工程学院,江苏镇江 212013)

出版日期:2015-11-15 发布日期:2015-12-15
作者简介:姚红兵(1976—),男,博士,副教授。研究方向:光电检测和激光技术及应用。E-mail:yaoye@ujs.edu.cn。李亚茹(1990—),女,硕士研究生。研究方向:激光打孔应用和镜片瑕疵检测。
基金资助:
江苏省南京市应用技术研究计划基金资助项目(1421007)

Study on Aspheric Lens Focusing System of Polygon Laser Scanning Beam

YAO Hongbing,LI Yaru,GAO Yuan,YU Wenlong

(School of Mechanical Engineering,Jiangsu University,Zhenjiang 212013,China)

Online:2015-11-15 Published:2015-12-15

摘要/Abstract

摘要：

为了提高激光打孔生产质量和降低生产成本,提出了一种多棱镜旋转扫描非球面透镜聚焦在线打孔方案。系统将CO2激光器发出的连续光束经光调制器入射在多棱镜的其中一个表面上,光束经过反射依次扫入聚焦透镜组中。由于轴外像差和扫描速度失真会引起聚焦光斑的线性畸变,从而导致打孔形状的变化,通过选取非球面透镜对光束整形,在聚焦同时调整聚焦光斑的形状以控制打孔的形状。结果表明,在扫描系统中线性误差可控制在0.5%内,打孔大小形状满足生产要求,与传统激光打孔方式相比,提高了打孔的质量与效率。

关键词: 激光技术, 打孔, 旋转多棱镜, 聚焦透镜, 光束整形

Abstract:

This paper presents a focusing online drilling method of polygon mirror rotational scan a spherical lens to improve the production quality and reduce the production cost of laser drilling.The continuous beam emitted by CO2 laser is converged onto one of the upper surface of the polygon mirror via the optical modulator,and then the reflected light beams successively sweep into the focusing lens group.Since the linear distortion of focus spot,caused by off-axis aberration and the distortion of scanning speed,can lead to changes of the punch shape,aspheric focusing lens are used for beam shaping so that the shape of punch can be controlled by adjusting the shape of focus spot while focusing.The results show that the linearity error of scanning system can be controlled within 0.5%.This method improves the quality and efficiency of drilling compared with the conventional laser drilling methods.

Key words: laser technology;drilling;rotating polygon;focusing lens;beam shaping

中图分类号:

TN249

姚红兵,李亚茹,高原,于文龙. 多棱镜激光扫描非球面透镜聚焦系统研究[J]. , 2015, 28(11): 61-.

YAO Hongbing,LI Yaru,GAO Yuan,YU Wenlong. Study on Aspheric Lens Focusing System of Polygon Laser Scanning Beam[J]. , 2015, 28(11): 61-.

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[2]	刘波波,邓泽怀. 2 μm掺铥光纤激光研究进展及其应用[J]. , 2014, 27(3): 133-.