基于线性移相误差的[WT《A》]N步移相算法

›› 2016, Vol. 29 ›› Issue (2): 30-.

基于线性移相误差的[WT《A》]N步移相算法

张少丹,李琳

(上海理工大学光电信息与计算机工程学院,上海 200093)

出版日期:2016-02-15 发布日期:2016-02-25
作者简介:张少丹(1991—),女,硕士研究生。研究方向:图像处理。李琳(1983—),女,副教授,硕士生导师。研究方向:鲁棒控制等。

N-Sample Phase-Shifting Algorithm Based on Linear Phase-Shift Error

ZHANG Shaodan,LI Lin

(School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China)

Online:2016-02-15 Published:2016-02-25

摘要/Abstract

摘要：

移相误差是影响移相干涉术测量精度的主要来源,针对移相器的线性移相误差,文中提出一种新型的移相干涉术算法-N步移相算法。该算法通过最小二乘法估计出移相器做等步移相时的实际移相相位,利用上述估计值代入相位计算公式获得被测物体的相位分布。同时对该算法进行仿真研究,其结果表明,算法能准确地估计移相相位,获得被测物体的精确相位分布,并可实现λ/100的高精度测量,且在测量精度上明显优于其他算法。

关键词: 线性移相误差, 移相干涉术, 移相器, 相位分布

Abstract:

Phase-shift error is always the main source of the measurement precision in phase-shifting interferometry.In this paper,a new phase-shifting interferometry algorithm named N-sample phase-shifting algorithm is proposed,which can greatly reduce the phase reset error caused by linear phase shifting deviation.Firstly,step phase shifts of phase shifter are estimated.Secondly,the phase distribution of a fringe pattern is calculated by using the obtained phase shifts.Computer simulation shows the proposed algorithm accurately estimates the phase shift and obtains the phase distribution with an accuracy of λ/100,much better than those of existing algorithms.

Key words: linear phase shift error;phase shifting interferometry;phase shifter;phase distribution

中图分类号:

TN247

张少丹,李琳. 基于线性移相误差的[WT《A》]N步移相算法[J]. , 2016, 29(2): 30-.

ZHANG Shaodan,LI Lin. N-Sample Phase-Shifting Algorithm Based on Linear Phase-Shift Error[J]. , 2016, 29(2): 30-.

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