50 μm级D形硬质合金微铣刀铣削纯铜试验研究

doi:10.16180/j.cnki.issn1007-7820.2021.01.007

电子科技 ›› 2021, Vol. 34 ›› Issue (1): 36-42.doi: 10.16180/j.cnki.issn1007-7820.2021.01.007

50 μm级D形硬质合金微铣刀铣削纯铜试验研究

严广和^1,²,姜晨¹,张勇斌²,洪小兰¹,钱大兵¹

^1. 上海理工大学机械工程学院,上海 200093
^2. 中国工程物理研究院机械制造工艺研究所,四川绵阳 621900

收稿日期:2019-11-07 出版日期:2021-01-15 发布日期:2021-01-22
作者简介:严广和(1995-),男,硕士研究生。研究方向:微铣削加工。姜晨(1978-),男,博士,教授。研究方向:超精密加工。张勇斌(1975-),男,博士,研究员。研究方向:微细特种加工技术。
基金资助:
国家自然科学基金(51475310);创新发展基金创新项目(K1173-1921-TCF)

Experimental Study on Milling Pure Copper with 50 μm D-Shaped Cemented Carbide Micro-Milling Cutter

YAN Guanghe^1,²,JIANG Chen¹,ZHANG Yongbin²,HONG Xiaolan¹,QIAN Dabing¹

^1. School of Mechanical Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China
^2. Institute of Machinery Manufacturing Technology,China Academy of Engineering Physics,Mianyang 621900,China

Received:2019-11-07 Online:2021-01-15 Published:2021-01-22
Supported by:
National Natural Science Foundation of China(51475310);Innovation Development Fund Innovation Project(K1173-1921-TCF)

摘要/Abstract

摘要：

针对折叠波导慢波结构的微型化和高精度要求,采用自研的μEM-200CDS2组合高精度加工机床,通过线电极电火花磨削技术,制备出直径为50 μm级的D形微铣刀。在纯铜工件上开展工艺试验,研究微槽的表面质量。使用白光干涉仪、超景深显微镜、扫描电镜等仪器来观察微槽的变化情况,获得了微槽表面形貌、粗糙度等随铣削距离的变化规律,并对微铣削过程中的表面质量变化及毛刺形成的现象进行了分析。结果表明,槽底刀具的旋转轨迹纹路先是集中在刀具切出方向,随着刀具磨损,转为刀具进给方向;微槽顺铣侧毛刺多于逆铣侧,并随着铣削距离的增加而增多;微槽槽底粗糙度以线性增长趋势不断上升。

关键词: 折叠波导慢波结构, 线电极电火花磨削, D形微铣刀, 表面质量, 毛刺形成, 粗糙度

Abstract:

According to the requirement of miniaturization and high precision of folded waveguide slow wave structure, D-Shaped micro-milling cutter with diameter of 50 μm is fabricated by WEDG with the self-developed μEM-200CDS2 combined high precision machine tool. The surface quality of the microgroove is studied by the process test on the pure copper workpiece. White-light interferometer, ultra-depth-of-field microscope and scanning electron microscope are used to observe the variation of surface morphology and roughness of micro-grooves with milling distance, and the surface quality and burr formation during micro-milling are analyzed. These results show that the revolving track of the groove bottom tool is firstly concentrated in the cutting direction of the tool, and with the tool wear, it turnes to the feed direction of the tool. The burrs on the milling side of the micro groove are more than those on the reverse side, and increases with the increase of milling distance. Additionally, the roughness of the groove bottom increases with the linear growth trend.

Key words: folded waveguide slow wave structure, wire electro-discharge grinding, D-shaped micro-milling cutter, surface quality, burr formation, roughness

中图分类号:

TN605

严广和, 姜晨, 张勇斌, 洪小兰, 钱大兵. 50 μm级D形硬质合金微铣刀铣削纯铜试验研究[J]. 电子科技, 2021, 34(1): 36-42.

YAN Guanghe, JIANG Chen, ZHANG Yongbin, HONG Xiaolan, QIAN Dabing. Experimental Study on Milling Pure Copper with 50 μm D-Shaped Cemented Carbide Micro-Milling Cutter[J]. Electronic Science and Technology, 2021, 34(1): 36-42.

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参考文献 17

[1]	张栋文, 袁建民. 太赫兹技术概述[J]. 国防科技, 2015,36(2):12-16.
	Zhang Dongwen, Yuan Jianmin. Introduction to terahertz technology[J]. National Defense Technology, 2015,36(2):12-16.
[2]	宫玉彬, 周庆, 田瀚文, 等. 基于电子学的太赫兹辐射源[J]. 深圳大学学报(理工版), 2019,36(2):111-127.
	Gong Yubin, Zhou Qing, Tian Hanwen, et al. Terahertz radiation sources based on electronics[J]. Journal of Shenzhen University (Science and Technology Edition), 2019,36(2):111-127.
[3]	张章. 太赫兹行波管的研究进展[J]. 激光与红外, 2012,42(3):250-257.
	Zhang Zhang. Research progress of THz traveling wave tubes[J]. Laser and Infrared, 2012,42(3):250-257.
[4]	张芳. 太赫兹折叠波导行波管理论设计研究[D]. 绵阳:中国工程物理研究院, 2017.
	Zhang Fang. Design and research on traveling wave management theory of terahertz folded waveguide[D]. Mianyang:China Academy of Engineering Physics, 2017.
[5]	马天军. 太赫兹行波管折叠波导慢波结构制备工艺研究[D]. 北京:中国科学院大学, 2015.
	Ma Tianjun. Study on the fabrication technology of THz TWT folded waveguide slow wave structure[D]. Beijing:University of Chinese Academy of Sciences, 2015.
[6]	陈学斌, 高石磊, 孙传国, 等. 微径铣刀在太赫兹波导加工中的应用[J]. 微波学报, 2015,31(S1):108-111.
	Chen Xuebin, Gao Shilei, Sun Chuanguo, et a1. Application of micro-mill in the processing of terahertz wave-guide[J]. Journal of Microwaves, 2015,31(S1):108-111.
[7]	李迎. 微铣削加工技术研究现状及发展趋势[J]. 电子机械工程, 2008,24(6):26-32.
	Li Ying. Recentadvances in micro-milling and its future development trend[J]. Electro-Mechanical Engineering, 2008,24(6):26-32.
[8]	包杰, 李亮, 何宁. 国外微细铣削研究综述[J]. 机械科学与技术, 2009,28(8):1018-1022.
	Bao Jie, Li Liang, He Ning. Abrief review of micro-milling technology[J]. Mechanical Science and Technologyfor Aerospace Engineering, 2009,28(8):1018-1022.
[9]	巩亚东, 张金峰, 张永震, 等. 微尺度高速铣削表面质量的试验研究[J]. 机械工程学报, 2013,49(13):190-198.
	Gong Yadong, Zhang Jinfeng, Zhang Yongzhen, et al. Experimentalresearch on surface quality in the process of high-speed and micro-scale milling[J]. Journal of Mechanical Engineering, 2013,49(13):190-198.
[10]	Liu H T, Sun Y Z, Geng Y Q, et al. Experimental research of milling force and surface quality for TC4 titanium alloy of micro-milling[J]. International Journal of Advanced Manufacturing Technology, 2015,79(1-4):705-716.
[11]	Wu X, Li L, He N, et al. Investigation on the surface formation mechanism in micro milling of cemented carbide[J]. International Journal of Refractory Metals and Hard Materials, 2019,78:61-67.
[12]	蔡明, 巩亚东, 高奇, 等. 单晶铝微尺度铣削表面质量实验研究[J]. 机械设计与制造, 2018(2):85-87.
	Cai Ming, Gong Yadong, Gao Qi, et al. Experimentalstudy on surface quality of single crystal aluminum in micro-milling[J]. Machinery Design and Manufacture, 2018(2):85-87.
[13]	Yan J W, Uchida K, Yoshihara N, et al. Fabrication of micro end mills by wire EDM and some micro cutting tests[J]. Journal of Micromechanics and Microengineering, 2009,19(2):25004-25016.
[14]	Fleischer J, Deuchert M, Ruhs C, et al. Design and manufacturing of micro milling tools[J]. Microsystem Technologies Micro and Nanosystems Information Storage and Processing Systems, 2008,14(9-11):1771-1775.
[15]	徐翱, 周泉丰, 阎磊, 等. 0.22THz折叠波导行波管初步实验研究[J]. 强激光与粒子束, 2013,25(11):2954-2958.
	Xu Ao, Zhou Quanfeng, Yan Lei, et al. Initial experimental study on 0.22 THz folded waveguide TWT[J]. High Power Laser and Particle Beams, 2013,25(11):2954-2958.
[16]	王亚军, 徐翱, 颜胜美, 等. 微加工工艺误差对THz折叠波导行波管性能影响[J]. 太赫兹科学与电子信息学报, 2015,13(2):179-183.
	Wang Yajun, Xu Ao, Yan Shengmei, et al. Effect of microfabrication process on Terahertz folded waveguide TWT[J]. Journal of Terahertz Science and Electronic Information Technology, 2015,13(2):179-183.
[17]	杨正杰, 张勇斌, 徐凌羿. 微铣刀制备技术与实验研究[J]. 电加工与磨具, 2016(3):56-61.
	Yang Zhengjie, Zhang Yongbin, Xu Lingyi. Experimentalstudy on manufacturing technology of micro milling tools[J]. Electromachining & Mould, 2016(3):56-61.

硬质合金
密度ρ/g·cm^-3	14.40
弹性模量E/GPa	800
泊松比μ	0.22
硬度HV/MPa	1 900
晶粒度Z_v/μm	0.4
Co含量/%	9
抗弯强度f/N·mm^-2	4 000

50 μm级D形硬质合金微铣刀铣削纯铜试验研究

Experimental Study on Milling Pure Copper with 50 μm D-Shaped Cemented Carbide Micro-Milling Cutter

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