ZnO紫外光电阴极制备及激活工艺技术

›› 2011, Vol. 24 ›› Issue (7): 148-.

ZnO紫外光电阴极制备及激活工艺技术

徐华腾

(厦门大学信息科学与技术学院,福建厦门 361005)

出版日期:2011-07-15 发布日期:2011-08-16
作者简介:徐华腾(1984—),男,硕士研究生。研究方向:光电材料磁性材料。

Preparation and Activation Technology of the Zno Ultraviolet Electricity Cathode

XU Hua-Teng

(College of Information Science and Technology,Xiamen University,Xiamen 361005,China)

Online:2011-07-15 Published:2011-08-16

摘要/Abstract

摘要：

采用磁控溅射方法,探索ZnO薄膜制备的最佳工艺。研究了氧氩比、基片温度,对晶粒质量的影响,以及表面电阻与溅射时间之间的关系,使薄膜具有高电阻率,并研究了激活前后光暗电流的关系,满足薄膜在紫外探测器领域的应用。

关键词: ZnO光电阴极, ZAO薄膜, 磁控溅射法, 激活工艺

Abstract:

ZnO photocathodes show extensive prospect in ultraviolet detection.ZnO is a suitable candidate for the UV optoelectronic device applications at room temperature.The relationship between Cr electrode sputtering time and transparency and surface resistance is discussed.The relationship between the dark current and photocurrent are studied.

Key words: ZnO photocathodes;ZAO thin film;Rfsputtering;activation

中图分类号:

TN904.2+1

徐华腾. ZnO紫外光电阴极制备及激活工艺技术[J]. , 2011, 24(7): 148-.

XU Hua-Teng. Preparation and Activation Technology of the Zno Ultraviolet Electricity Cathode[J]. , 2011, 24(7): 148-.