金刚石悬浮液抛光单晶锗片实验研究

杨晓京,赵垒

Experimental Study on Polishing Single Crystal Germanium Flakes with Diamond Suspension Polishing Liquid

YANG Xiaojing,ZHAO Lei

电子科技 . 2021, (3): 6 -12 . DOI: 10.16180/j.cnki.issn1007-7820.2021.03.002