基于SPH法微切削单晶锗动态过程模拟研究

doi:10.16180/j.cnki.issn1007-7820.2022.04.011

Abstract

Abstract:

In view of the difficulty of observing chip formation in flying cutting of single crystal germanium, a meshless simulation method (SPH method) is adopted in this study. The influence of cutting depth and cutting speed on cutting force and chip formation during plastic removal is studied by establishing a micro- cutting simulation model of single crystal germanium (111). The results show that when the cutting speed is 4 μm·μs^-1 and the cutting depth is 0.5 μm, 1 μm, 2 μm and 5 μm, the tangential force and normal force gradually increase and then decrease to a gentle fluctuation trend. It is concluded that the larger the cutting depth is, the greater the stable fluctuation value of cutting force is, and the critical cutting depth for chip generation is between 0.5 μm and 1μm. When the cutting depth of single crystal germanium is 1 μm and the cutting speed is 2 μm·μs^-1, 4 μm·μs^-1, 6 μm·μs^-1 and 8 μm·μs^-1, it is found that the tangential force and normal force are not affected by the cutting speed, and the critical cutting speed for chip formation is between 2 μm·μs^-1 and 4 μm·μs^-1.

Key words: single crystal germanium, meshless, SPH method, (111) crystal face, micro-cutting, plastic removal, simulation, chip formation

CLC Number:

TN304

Xiaojing YANG,Hongxiu YANG. Simulation of Dynamic Process of Micro-Cutting Single Crystal Germanium Based on SPH Method[J].Electronic Science and Technology, 2022, 35(4): 67-71.

Figures/Tables 8

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References 18

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Simulation of Dynamic Process of Micro-Cutting Single Crystal Germanium Based on SPH Method

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