电磁驱动微器件动态吸合特性分析

Abstract

Abstract:

The analysis of the pull-in of magnetostatic micro-devices (MMD) has been done using quasi-static assumptions traditionally. The models established are not exact enough because of the dynamic characteristics of the devices. So it is necessary to establish the dynamic models, which will be more suitable to the normal and could help the design and control of the micro-devices. Based on the energy balance equations, the dynamic pull-in characteristics of two MMD with the step input magneto motive force are analyzed, with the reluctance of the magnetic core m considered and the effect of system damping neglected. The results indicate that as to the parallel-plate device, the critical dynamic pull-in displacement of the mobile part is 1.5 times that when quasi-static pull-in occurs; as to the torsional device, the critical dynamic pull-in angle increases with the decrease of m, and changes from 1.29 to 1.46 times that when quasi-static pull-in occurs. The critical step inputs MMF of the two MMD are about 91.9％ and 91.2％ the quasi-statically predicted pull-in MMF of each MMD respectively.

Key words: magnetostatic actuated, micro-actuator, dynamic, pull-in

CLC Number:

O482.5

GUO Yong-xian;JIA Jian-yuan;ZHANG Da-xing. Dynamic pull-in of magnetostatic micro-devices[J].J4, 2009, 36(5): 896-901.

References

［1］Degani O, Socher E, Lipson A, et al. Pull-in Study of an Electrostatic Torsion Microactuator［J］. J Micro-electromechnical Systems,1998, 7(4): 373-379.
［2］Nemirovsky Y, Degani O. A Methodology and Model for the Pull-In Parameters of Electrostatic Actuators［J］. J MicroelectromeChanical Systems, 2001, 10(6): 601-615.
［3］方玉明, 黄庆安, 李伟华. 一种磁微执行器Pull-in模型［J］. 半导体学报, 2007, 28(10): 1647-1651.
Fang Yuming, Huang Qingan, Li Weihua. A Model for the Pull-In Phenomenon of Magnetic Microactuators with the Reluctance of Magnetic Cores［J］. Chinese Journal of Semiconductors, 2007, 28(10): 1647-1651.
［4］Nemirovsky Y, Zelniker I, Degani O, et al. A Methodology and Model for the Pull-In Parameters of Magnetostatic Actuators ［J］. J Microelectro-mechanical Systems, 2005, 14(6): 1253-1264.
［5］Gregory N N, George B. Dynamic Pull-in of Parallel-plate and Torsional Electrostatic MEMS Actuators［J］. J of Microelectromechanical Systems, 2006(15): 811-821.
［6］郭永献, 贾建援, 张秀艳, 等. MEMS电磁驱动微器件的失稳特性研究［J］. 中国机械工程, 2008, 19(16): 1976-1979.
Guo Yongxian, Jia Jianyuan, Zhang Xiuyan, et al. Instability Study of Electromagnetic Actuated Micro-devices ［J］. China Mechanical Engineering, 2008, 19(16): 1976-1979.
［7］ Ahn C H, Allen Mark G. A Fully Integrated Surface Micromachined Magnetic Microactuator with a Multilevel Meander Magnetic Core［J］. Journal of Microelectromechanical Systems,1993, 2 (1): 15-22.
［8］郭永献, 贾建援, 张大兴, 等. 考虑磁芯磁阻的微型磁器件吸合特性分析［J］. 西安电子科技大学学报, 2009, 36(1): 134-144.
Guo Yongxian, Jia Jianyuan, Zhang Daxing, et al. Pull-in Study of Magnetostatic Micro-devices with the Reluctance of the Magnetic Core ［J］. Journal of Xidian University, 2009, 36(1): 134-144.

[1]	WAN Zhiguo,HE Wangpeng,LIAO Nannan,DOU Yihua,GUO Baolong. Study on the vibration response mechanism of gear root crack and spalling [J]. Journal of Xidian University, 2021, 48(6): 131-137.
[2]	ZHAO Hui,FENG Nanzhi,WANG Quan,WAN Bo,WANG Jing. Dynamic semi-online task scheduling method for the edge computing platform [J]. Journal of Xidian University, 2021, 48(6): 8-15.
[3]	ZHANG Jiaqi,TAO Haihong,ZHANG Xiushe,HAN Chunlei. A multi-frame track before detect algorithm utilizing measurement space clustering [J]. Journal of Xidian University, 2021, 48(5): 231-238.
[4]	LIU Hong,XU Le,TIAN Tong. Multi-channel charge readout ASIC for X-ray detection [J]. Journal of Xidian University, 2021, 48(4): 97-102.
[5]	MEI Shulin,JIA Hairong,WANG Xiaogang,WU Yifeng. Combination of dynamic features with a new mask to optimize neural network speech enhancement [J]. Journal of Xidian University, 2021, 48(3): 91-98.
[6]	LI Han,ZHANG Chen,HUANG Hejiao,GUO Yu. Algorithm for encrypted search with forward secure updates and verification [J]. Journal of Xidian University, 2020, 47(5): 48-56.
[7]	SI Chengxiang,GAO Feng,ZHU Liehuang,GONG Guopeng,ZHANG Can,CHEN Zhuo,LI Ruiguang. Covert data transmission mechanism based on dynamic label in blockchain [J]. Journal of Xidian University, 2020, 47(5): 94-102.
[8]	LI Zhao,YUAN Wenhao,REN Chongguang,HUANG Chengcheng,DONG Xiaoxiao. Approximate computing method based on cross-layer dynamic precision scaling for the k-means [J]. Journal of Xidian University, 2020, 47(3): 50-57.
[9]	LU Wanjie,LAN Chaozhen,LV Liang,SHI Qunshan,XU Qing. Dynamic inference method for the orbit status of space objects [J]. Journal of Xidian University, 2020, 47(3): 72-79.
[10]	JIA Dingcheng,WANG Leilei,GAO Wei. Analysis and detection of TDDB degradation for DRAM in 3D-ICs [J]. Journal of Xidian University, 2019, 46(4): 182-189.
[11]	CHEN Chu. RFCcertDT: a testing tool for certificate validation in SSL/TLS [J]. Journal of Xidian University, 2019, 46(3): 20-25.
[12]	BI Cheng,WANG Linglin,LIU Yongxin. Algorithm for the assessment of ship situation based on the parameter adaptive dynamic Bayesian network [J]. Journal of Xidian University, 2019, 46(2): 158-163.
[13]	DUAN Zhao, LIU Kunlong. Dynamic program verification via a CPAChecker [J]. Journal of Xidian University, 2019, 46(1): 33-38.
[14]	YANG Xin1,2;WEI Bing1,2;YIN Weike1,2;TAN Chang3. Influence of the aerodynamic shape of a hypersonic vehicle on characteristics of EM wave propagation [J]. Journal of Xidian University, 2018, 45(3): 40-44+162.
[15]	XIONG Yu;LI Zhiqiang;YANG Yaya. Dynamic cross-layer protection strategy in optical inter-datacenter networks [J]. Journal of Xidian University, 2018, 45(3): 136-142.

Dynamic pull-in of magnetostatic micro-devices

PDF (PC)

Like

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 15

Metrics

Comments

Recommended 0