关键词: 微机电, 悬臂梁, 谐振频率, 有限元分析

Abstract:

This paper addresses an issue in energy harvesting that has plagued the potential use of harvesting through the piezoelectric effect at the micro-electro-mechanical systems (MEMS) scale.Effective energy harvesting devices typically consist of a cantilever beam substrate coated with a thin layer of piezoceramic material to resonant at the dominant frequency of the ambient vibration.The fundamental natural frequency of a beam increases as its length decreases,so that at the MEMS scale resonance occurs orders of magnitude higher than ambient vibration frequencies,rendering the harvester ineffective.Here,we propose a new geometry for MEMS scale cantilever harvesters with low fundamental frequencies.To this zigzag configuration,we proved it can decrease its resonant to ambient by ANSYS.

Key words: MEMS;piezoceramic material;resonance;ansys