关键词: 背照, CCD, 减薄, 成像

Abstract:

Backside-illuminated charge-coupled devices (CCDs) need backside thinning.A novel chemical after mechanical thinning technique is proposed.Aluminium oxide abrasive is used for grinding thinning to reduce the thickness to 100μm,and solution mixed by HF acid,nitric acid and ice acetic acid for chemical corrosion.Experiments show that a ratio of 2:1:11 of HF acid,nitric acid and ice acetic acid achieves a substrate to epitaxial layer corrosion rate of 89:1.This technique is used to thin the 1 024×512 visible light CCD,which realizes backside-illuminated imaging.

Key words: backside-illuminated;charge-couple device;thinning