关键词: MOCVD, 有限元分析, 温度场, 调节曲线

Abstract:

The change of the peak point of the heating modulate curve,which is based on the modulation of the temperature,in the 2D numerical modeling for the MOCVD reactor is studied by the finite element method with the chipped infrared heating system as a research subject.According to calculation,the change of the modulate curve peak point has a close relationship to the material thermal properties of the Susceptor,the heating power,the geometric shapes and position of the heater in the chipped infrared heating system.The internal causes of peak shift are explained.In addition,three principles of designing the heating system are established:The larger the number of heaters is,the more flexible the system modulation is;the biggest power of the outer heater should be greater than the inner heater;the size of outermost heater should be small.The results are beneficial to the design of the MOCVD heating system and the optimization of the heating conditions.

Key words: MOCVD;finite element analysis;temperature field;modulate curve