Abstract:

A single-axis MEMS gyroscope signal process circuit is designed based on a MEMS sensor.Stability of the closed-loop drive circuit is analyzed in time domain.A switched-capacitor CV-converter which is not sensitive to common section of the sensor capacitor is proposed.Results indicate that the linearity is smaller than ±0.5%,power consumption smaller than 150 mW and resolution of ADC greater than 11 bits.

Key words: MEMS gyroscope;close-loop drive;CV converter