微机械陀螺仪设计与研究

Abstract

Abstract:

This paper introduces the micro electro mechanical systems gyroscope important technology,category,performance comparison and the requirements of the performance parameters in different applications.The latest research results at home and abroad in recent years on the structure of the micro electro mechanical systems gyroscope are summarized.The structure,processing and performance of the micro electro mechanical systems gyroscopes,which are frame type,tuning fork,vibration wheel,vibration ring,rotors suspension,quality block,double vibrating and so on,are analyzed and compared.Emphasis is laid on the micro mechanical gyroscopes' three research difficulties of drift error,precision and packaging technology and the research development trend of high precision,micro machining dimension,structure and circuit optimization,monolithic multi degree of freedom and monolithic integration.

Key words: MEMS;gyroscope;structure characteristic;key technique

CLC Number:

TP212

LI Lingyu,LU Yi,CHEN Xing,XU Gaobin. Design of and Research on MEMS Gyroscope[J]., 2013, 26(9): 172-.

References

［1］许高斌,朱华铭,陈兴.不等高梳齿电容式三轴加速度传感器［J］.电子测量与仪器学报,2011,25(8):704-710.

［2］郭慧芳,李锦明,刘俊.三框架电容式硅微机械陀螺动力分析［J］.传感器与微系统,2008,27(5):24-26.

［3］LAI Shihwei,KIANG Jeanfu.A CMOS-MEMS single-chip dual-axis gyroscope［C］.IEEE International Microsystems Packing Assembly and Circuits Technology Conference,2009:305-307.

［4］许宜申,王寿荣,王元山.单片三轴硅微机械振动陀螺仪研究［J］.高技术通讯,2006,16(10):1034-1038.

［5］吴其松,杨海钢,张翀,等.一种适用于MEMS陀螺仪的高性能电容读出电路［J］.仪器仪表学报,2010,31(4):937-943.

［6］张琼.电容式微机械陀螺仪的设计与仿真分析［J］.机电技术,2011(5):97-100.

［7］裘安萍,苏岩.振动轮式微机械陀螺仪中滑膜阻尼机理的研究［J］.中国机械工程,2006,17(16):1679-1682.

［8］张明,陈德勇,王军波.单晶硅振动环陀螺仪的制作［J］.光学精密工程,2010,18(11):2454-2460.

［9］王嫘,韩丰田,董景新,等.微静电陀螺仪的结构设计与工艺实现［J］.纳米技术与精密工程,2011,9(3):265-269.

［10］SAID E A,KIVANC A,TAYFUN A.A high-performance silicon-on-insulator MEMS gyroscope operating at atmospheric pressure［J］.Sensors and Actuators,2007,135(2):34-42.

［11］李建利,房建成,盛蔚等.双质量块调谐输出式硅MEMS陀螺仪的理论计算及仿真［J］.光学精密工程,2008,16(3):484-491.

［12］ALPER S E,AKIN T.A Single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate［J］.Journal of Microelectromechanical Systems,2005,14(4):707-717.

［13］殷勇,王寿荣,王存超,等.结构解耦的双质量硅微陀螺仪结构方案设计与仿真［J］.东南大学学报:自然科学版,2008,38(5):918-922.

［14］殷勇,王寿荣,王存超等.一种双质量硅微陀螺仪［J］.中国惯性技术学报,2008,16(6):703-711.

［15］温姣,常艳辉,梁永生.一种新型微机械陀螺仪结构方案设计与仿真［J］.计算机光盘软件与应用,2010(8):104.

［16］何晓磊,苏岩.采用DDSOG工艺加工Z轴微机械陀螺仪实验［J］.东南大学学报:自然科学版,2005,35(4):545-548.

［17］施芹,苏岩,裘安萍,等.MEMS陀螺仪器件级真空封装技术［J］.光学精密工程,2009,17(8):1987-1992.

［18］SUN Hongzhi,JIA Kemiao,DING Yingtao,et al.A monolithic inertial measurement unit fabricated with improved DRIE post-CMOS process［C］.Proceedings of IEEE Sensors,2010:1198-1202.

［19］SUN Hongzhi,JIA Kemiao,LIU Xuesong,et al.A low temperature-dependence gain-boosting front-end amplifier for CMOS-MEMS gyroscopes［C］.Proceedings of IEEE Sensors,2010:1029-1032.

［20］XIE Huikai,SUN Hongzhi,JIA Kemiao,et al.Multi-Axis integrated CMOS-MEMS inertial sensors［C］.10th IEEE International Conference on Solid-State and Integrated Circuit Technology,2010:1394-1395.

［21］李孟委,刘俊,刘韶轩,等.基于介观压阻效应的新型微陀螺仪结构设计与优化［J］.测试技术学报,2009,23(6):519-525.

［22］王瑞荣,杜康,石云波,等.静电驱动压阻检测微机械陀螺仪的研究［J］.测试技术学报,2010,24(4):334-338.

［23］LIU Lishuang,LIU Jun,SHI Yunbo,et al.GaAs/InxGA1-xAs/GaAs/AlAs resonant tunneling diodes for novel MEMS gyroscope application［C］.IEEE Transducers'll,2010:28-31.

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Design of and Research on MEMS Gyroscope

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