磁场辅助的小型化潘宁离子源点时燃放电特性研究

doi:10.16180/j.cnki.issn1007-7820.2023.05.011

Abstract

Abstract:

During the miniaturization of Penning ion source, there are some problems such as the increase of ignition voltage, breakdown of insulating material between cathode and anode and unstable discharge. In order to promote the miniaturization of the internal structure of the Penning ion source, the stable discharge of the Penning ion source is achieved by increasing the magnetic field under the constant electric field, the voltage drop discharge is achieved, the service life of the insulating material is extended, and the stable discharge is achieved. In addition, COMSOL Multiphysics software is used to simulate the distribution of electric field and magnetic field inside the improved ion source, and to simulate and analyze the motion and ionization of electrons in different regions. Based on this, a physical model of ignition based on constant electric field and magnetic field is established. The results of comparison between the model and the actual ignition experiment show that the improved small Penning ion source can realize stable discharge only by increasing the magnetic field to 156.29 mT under the condition of constant voltage of 0.8kV.

Key words: Penning ion source, ignitionn voltage, avalanche effect, Townsend discharge, glowing discharge, ionization distance, ignition model, simulation

CLC Number:

TP391.9

ZHANG Jinghao,ZHANG Xuanxiong,Christian Wolf,Michael Wick. Study on the Characteristics of Ignition Discharge of A Small Penning Ion Source by Increasing Magnetic Field[J].Electronic Science and Technology, 2023, 36(5): 71-79.

Figures/Tables 17

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p /mbar	B /mT
2.37×10^-4	179.52
3.35×10^-4	176.49
4.52×10^-4	174.98
6.10×10^-4	174.47
7.33×10^-4	172.45
8.31×10^-4	164.37
9.49×10^-4	156.29

Study on the Characteristics of Ignition Discharge of A Small Penning Ion Source by Increasing Magnetic Field

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