MEMS电容式压力传感器检测电路比较研究

›› 2015, Vol. 28 ›› Issue (1): 186-.

• 论文 • 上一篇

MEMS电容式压力传感器检测电路比较研究

黄雨濛,戚昊琛,胡智文,张鉴

(1.合肥工业大学电子科学与应用物理学院,安徽合肥 230009;2.浙江传媒学院新媒体学院,浙江杭州 310018)

出版日期:2015-01-15 发布日期:2015-01-22
作者简介:黄雨濛(1990—),女,硕士研究生。研究方向:微机电系统的设计与制造。E-mail:913471298@qq.com
基金资助:
东南大学MEMS教育部重点实验室开放基金资助项目(LY13F010006);浙江省自然科学基金资助项目(LY12F02014);合肥工业大学科学研究发展基金资助项目(J2014HGXJ0091、J2014HGXJ0082)

Research on Detection Circuits for MEMS Capacitive Pressure Sensor

HUANG Yumeng,QI Haochen,HU Zhiwen,ZHANG Jian

(1.School of Electronic Science & Applied Physics,Hefei University of Technology,Hefei 230009,China;
2.College of New Media,Zhejiang University of Media and Communication,Hangzhou 310018,China)

Online:2015-01-15 Published:2015-01-22

摘要/Abstract

摘要：

介绍了MEMS电容式压力传感器检测电路的5种实现方式:脉宽调制法、运算放大器法、电荷注入法、调频法和AC运放法。并从稳定性、测量灵敏度及抗杂散性等方面介绍了不同方式下检测电路的优缺点,为MEMS电容式压力传感器提供了参考。

关键词: 微电子机械系统, 电容压力传感器, 检测电路, 优缺点

Abstract:

MEMS capacitive pressure sensor has the advantages of low power consumption,good temperature stability,solid and fast dynamic response.Five kinds of detection circuit for MEMS capacitive pressure sensor are introduced,which are based on PWM,operational amplifiers,charge injection,FM and AC amplifier respectively.These detection circuits are compared in stability,sensitivity of measurements,resistance to spurious and some other aspects,and their advantages and disadvantages are concluded.This paper provides useful references to designer of detection circuit for MEMS capacitive pressure sensor.

Key words: MEMS;capacitive pressure sensor;detection circuit;advantage and disadvantage

中图分类号:

TN710.1

黄雨濛,戚昊琛,胡智文,张鉴. MEMS电容式压力传感器检测电路比较研究[J]. , 2015, 28(1): 186-.

HUANG Yumeng,QI Haochen,HU Zhiwen,ZHANG Jian. Research on Detection Circuits for MEMS Capacitive Pressure Sensor[J]. , 2015, 28(1): 186-.

MEMS电容式压力传感器检测电路比较研究

Research on Detection Circuits for MEMS Capacitive Pressure Sensor

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