可变电容式直线静电电机的驱动器设计

doi:10.16180/j.cnki.issn1007-7820.2021.04.004

Abstract

Abstract:

In view of the problems of poor low-speed performance of the variable-capacitance linear electrostatic motor under the sine wave-based driving method and the complicated design of the large-scale converter, a driving method based on the square wave is proposed. The stator electrodes are divided into A-phase electrodes, B-phase electrodes, and C-phase electrodes. Each phase electrode is connected to a square wave drive signal with a magnitude of 1 kV at different timings. The electrostatic force caused by the potential difference between the stator and the mover is used as the driving force of the motor. In order to obtain a compact and efficient power supply and a three-phase square wave with an amplitude of 1 kV, a DC-DC adjustable DC power supply based on a push-pull topology and a drive circuit based on a half bridge are designed. The feasibility of this method is proved by simulation and experiments. At low speeds, the drive waveforms at both ends of the motor are smooth, and the motor can move forward, forward and reverse smoothly. Simulation experiments show that at low speeds, the drive waveforms at both ends of the motor are smooth, and the motor can move forward, forward and reverse smoothly, indicating the feasibility of the proposed method.

Key words: electrostatic motor, driver, high voltage power supply, half-bridge drive, Maxwell, electrostatic field

CLC Number:

TN78

YUAN Yiwen,LI Huafeng,LI Xilong. Driver Design of Variable Capacitance Linear Electrostatic Motor[J].Electronic Science and Technology, 2021, 34(4): 18-23.

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References 15

[1]	王欣利, 程树康. 静电电动机及其研究发展状况[J]. 微特电机, 2001(6):12-15.
	Wang Xinli, Cheng Shukang. Status of electrostatic motor and its research and development[J]. Weite Motor, 2001 ( 6):12-15.
[2]	戴福彦, 张卫平, 陈文元 , 等. MEMS微电机综述[J]. 微电机, 2009,42(8):61-64,68.
	Dai Fuyan, Zhang Weiping, Chen Wenyuan , et al. Summary of MEMS micromotors[J]. Micromotors, 2009,42(8):61-64,68.
[3]	张忠榕, 刘武, 张卫平 , 等. 双定子静电微电机控制系统的信号检测研究[J]. 传感器与微系统, 2008(5):18-20,23.
	Zhang Zhongrong, Liu Wu, Zhang Weiping , et al. Research on signal detection of dual-stator electrostatic micromotor control system[J]. Sensors and Microsystems, 2008(5):18-20,23.
[4]	Yamamoto A, Niino T, Higuchi T , Modeling and identification of an electrostatic motor[J]. Precision Engineering, 2006,30(1):104-113.
[5]	Yamamoto A, Niino T, Higuchi T. Development of a controller for a high-power electrostatic motor[J]. Electrical Engineering in Japan, 2000,133(4):91-99.
[6]	Shang Z Z, Zhang W D, Zhang G J , et al. Mixed near field and far field sources localization algorithm based on MEMS vector hydrophone array[J]. Measurement, 2020,15(2):1-15.
[7]	Haider M L, Ullah A, Ali B , et al. Optimization of stress induced bending in mems based suspensions[J]. Optik, 2020,20(3):102-108.
[8]	Amit K, Ashudeep, Deepak Bansal , et al. Post-release deformation and curvature correction of an electrothermally actuated MEMS bilayer platform[J]. Microelectronic Engineering, 2020,22(1):37-42.
[9]	Fang K, Hu T J, Jiang X H , et al. Research on a MEMS based encrypted rotary safety and arming device[J]. Sensors and Actuators:A Physical, 2020,30(1):55-61.
[10]	Bertoni M, Telias I, Urner M , et al. A novel non-invasive method to detect excessively high respiratory effort and dynamic transpulmonary driving pressure during mechanical ventilation[J]. Critical Care, 2019,23(1):78-84. doi: 10.1186/s13054-019-2370-4 pmid: 30850022
[11]	Szymon B, Maja C, Katarzyna R , et al. Assessment of changes of regional ventilation distribution in the lung tissue depending on the driving pressure applied during high frequency jet ventilation[J]. BMC Anesthesiology, 2018,18(1):101-107. doi: 10.1186/s12871-018-0552-2 pmid: 30064377
[12]	Bialka S, Copik M, Rybczyk K , et al. Assessment of changes of regional ventilation distribution in the lung tissue depending on the driving pressure applied during high frequency jet ventilation[J]. BMC Anesthesiology, 2018,18(1):22-27. pmid: 29444638
[13]	Liao J, Malusà M G, Zhao L , et al. Divergent plate motion drives rapid exhumation of (ultra)high pressure rocks[J]. Earth & Planetary Science Letters, 2018,49(1):67-80.
[14]	Mondal M, Misra R P, De S. Combined electroosmotic and pressure driven flow in a microchannel at high zeta potential and overlapping electrical double layer[J]. International Journal of Thermal Sciences, 2014,86(2):48-59.
[15]	余瑞容, 张启东. 一种应用于高压电机驱动的电平移位电路[J]. 电子科技, 2019,32(12):11-16.
	Yu Ruirong, Zhang Qidong. A level shifting circuit applied to high voltage motor drive[J]. Electronic Science and Technology, 2019,32(12):11-16.

Driver Design of Variable Capacitance Linear Electrostatic Motor

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