微机电系统麦克风灵敏度不确定性分析

doi:10.19665/j.issn1001-2400.2019.06.004

Abstract

Abstract:

Due to the diaphragm uncertainties from manufacturing processes, the MEMS microphone may exhibit significant variations in their performance compared to the nominal design. In order to reduce calculation time and improve simulation efficiency, this paper presents the Latin hypercube Monte Carlo Simulation (LHMCS) based on artificial neural networks (ANNs), which is used to analyze the sensitivity uncertainty of the polysilicon circular clamped diaphragm microphone. Experimental results show that the simulated qualified rate of the MEMS microphone is 92.9% and the time-consuming is less than 10 seconds and that compared with the traditional Monte Carlo simulation based on random sampling, LHMCS needs only 11% of the sampling number at the same accuracy. This paper also analyzes the effects of nominal design values of the diaphragm on the probability distributions of microphone sensitivities. The mean values and standard deviations of the sensitivity distributions are obtained by fitting the simulation results with normal distribution. The results show that three main factors affecting the distribution in the order from strength to weakness are radius, thickness, and young modulus. Young modulus only affects the mean value, but does not affect the standard deviation. The presented LHMCS with high accuracy and efficiency is an alternative to the traditional methods.

Key words: neural networks, Latin hypercube Monte Carlo simulation, MEMS microphone, sensitivity analysis, probability distributions

CLC Number:

TN44

LIU Lei,JIA Renxu. Analysis of sensitivity uncertainty of the MEMS microphone based on Latin hypercube Monte Carlo simulation[J].Journal of Xidian University, 2019, 46(6): 23-29.

Figures/Tables 9

References 20

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参数	数值范围	步进量	参数	数值范围	步进量
R/mm	0.5~1.0	0.01	d/mm	1
h/μm	8~12	1	E/GPa	171~209	9.5
g/μm	20		ν	0.23

振膜参数设计值		均值μ	标准差δ
h=10 μm,E=190 GPa	R=0.6 mm	0.122	0.087
	R=0.7 mm	0.223	0.119
	R=0.8 mm	0.381	0.156
	R=0.9 mm	0.612	0.199
	R=1.0 mm	0.943	0.242
R=1 mm,E=190 GPa	h=8 μm	1.802	0.333
	h=9 μm	1.280	0.292
	h=10 μm	0.943	0.242
	h=11 μm	0.705	0.213
	h=12 μm	0.545	0.188
R=1 mm,h=10 μm	E=171.0 GPa	1.030	0.247
	E=180.5 GPa	0.981	0.246
	E=190.0 GPa	0.940	0.243
	E=199.5 GPa	0.892	0.245
	E=209.0 GPa	0.840	0.246

Analysis of sensitivity uncertainty of the MEMS microphone based on Latin hypercube Monte Carlo simulation

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